A series of tungsten alkyl(aryl)-hydrazide tetrahalide acetonitrile adducts WCl4W=N-R(MeCN) (R = NMe2, N-piperidinyl, NPh2) was synthesized and characterized.
The complexes were applied as precursors for the deposition of tungsten carbonitride WNxCy thin films on Si(100) substrates by MOCVD. The deposited film were characterized by XRD (crystallinity), XPS (composition), cross-sectional SEM.(film thickness and morphology). [[i]]
[i] J. Köller, PhD Thesis, 2008, University of Florida, « Synthesis, characterisation and utilisation of new diorganohydrazido(2-) tungsten complexes as single-source precursors for MOCVD of WNxCy thin films », http://etd.fcla.edu/UF/UFE0022814/koller_j.pdf