GaCl(OC(CF3)2CH2NMe2)2 was synthesized by reaction of GaCl3 with the in situ prepared sodium aminoalkoxide NaOC(CF3)2CH2NMe2. Single-crystal X-ray diffraction indicated the formation of a trigonal-bipyramidal structure with Cl and alkoxy groups occupying the equatorial sites and the N donors located at the axial positions.
GaCl(OC(CF3)2CH2NMe2)2 was evaluated as precursor molecule for Ga2O3 growth by CVD. As-deposited films were analyzed using SEM, XPS and RBS. [470]