Zinc carboxylates are non-pyrophoric solids, so are more convenient to handle, however, due to their oligomeric nature they are more difficult to vaporize, what limits their use as precursors in MOCVD application. However, some examples for their use as sources for the growth if Zn-contaning thin films has been reported.
Zinc acetate Zn(OAc)2 was reported as a CVD precursor for films with electronic purposes [[i]].
Zinc acetate [Zn(C2H3O2)2] dissolved in methanol was applied for the growth of zinc oxide thin films by aerosol assisted CVD at 400-650°C on glass substrates. The thin films were highly transparenct in the visible and infrared regions (80–95%) and had 001 (c-axis) preferred orientation; surface morphology and crystallographic orientation were dependent on the substrate temperature. The photocatalytic activity of the grown ZnO films was determined using the destruction rate of stearic acid (SA) by UV irradiation, monitored via infrared spectroscopy (IRS); the highest activity was observed in the films grown at 650°C. [312]
ZnO films were grown using Zn(OAc)2 by atmospheric pressure CVD at growth rate 600nm/min at 500°C growth temperature [25 in 296]
[i] M. Hattori, T. Maeda, Japan. Kokai 73 29,699 (1973)
Zinc propionate (Zn(C2H5COO)2
Zinc propionate was found to be a useful CVD source material for zinc oxide [313]