ARSINE
Arsine AsH3 is the most common MOCVD precursor. It can be purified to very high quality and high-quality arsenide layers can be obtained.
Purity of AsH3
Nowadays the purity of AsH3 as MOCVD chemical significantly improved compared to earlier times. F.e., in 1990 measurements by Fourier transform ion cyclotron resonance mass spectrometry (FTICR), one arsine sample was 99.999% pure, whereas the other contained significant amounts of methylarsine (38 ppm), dimethylarsine (36 ppm) and hydroxyarsine (36 ppm). [573]