Tricarbonyl(arene)chromium compounds were reported to be useful as chromium sources in OMCVD [840,932]
Chromium benzene tricarbonyl (η6-C6H6)-Cr(CO)3 has been synthesized by replacement reaction of hexacarbonylchromium and benzene:
Cr(CO)6 + C6H6 → (η6-C6H6)Cr(CO)3 + 3 CO (DT)
It has been considered as potential CVD precursor for chromium-containing layers [910]