Zirconium alkylcyclopentadienyls acetylides were proposed as potential MOCVD precursors for ZrO2 layers.
They were synthesized by reaction of alkylcyclopentadienyl zirconium halides with Mahnesium metal in the presence of alkylacetylenes:
(h5-C5H4R)2ZrCl2 + Mg + R’C≡CR’ → (h5-C5H4R)2Zr(h2-R’C≡CR’) + MgCl2