Dimethylphenylsilane (DMPS) is used in the semiconductor industry for PECVD of SiC:H, to deposit low k etch stops and barriers in advanced semiconductor devices. It is a colorless liquid in normal conditions. Semiconductor DMPS is obtained by a three-steps ultra-purification of low-grade DMPS. The raw DMPS itself is made from a Grignard reaction, and special care is to be taken to avoid the formation of unwanted by-products that would be difficult to separate by distillation and to keep the chloride level at an extremely low level. [568]