Aluminum borhydrides
Aluminum borhydrides and their adducts with trimethylamine are potentially promising Al-B single source CVD precursors.
Possible ways of the synthesis of these precursors:
AlH3 + 3 BH3 → Al(BH4)3
AlCl3 + 3 Na[BH4] → Al(BH4)3 + 3 NaCl
Al(BH4)3 + NMe3 → (Me3N)Al(BH4)3