YTTRIUM N,N-DIALKYLAMINODIBORANATES

New lanthanide CVD precursors Ln(H3BNMe2BH3)3 containing N,N-dimethylaminodiboranate ligand (a new kind of multidentate borohydride) have been prepared,  including yttrium tris(N,N-dimethylaminodiboranate) Y(H3BNMe2BH3)3. The structures and coordination number of the Ln(H3BNMe2BH3)3 complexes were highly dependent on the size of the lanthanide ions; the complexes including Y(H3BNMe2BH3)3 are highly volatile and sublime in vacuum at temperatures as low as 65 °C.

Yttrium tris(N,N-dimethylaminodiboranate) Y(H3BNMe2BH3)3

     Yttrium tris(N,N-dimethylaminodiboranate) Y(H3BNMe2BH3)3 (with H2O as a coreactant) was applied as precursor to deposit Y2O3 films by CVD on Si substrates at 300 °C . [[i]]

[i] Scott R. Daly, Do Young Kim, Yu Yang, John R. Abelson, Gregory S. Girolami, J. Am. Chem. Soc., 2010, 132 (7), pp 2106–2107, DOI: 10.1021/ja9098005 , « Lanthanide N,N-Dimethylaminodiboranates: Highly Volatile Precursors for the Deposition of Lanthanide-Containing Thin Films »

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