Tris(dimethylamido) tert-butyl titanium Ti(NMe2)3(tBu) (M =) is orange oil with boiling point 80 "C/0.l Torr.
Characterisation: µ-Analysis: Calc. for TiN3C10H2,: N, 17.71; C, 50.63; H, 11.47. Found: N, 17.12; C, 50.02; H, 11.30.
'H NMR (C6D6, δ) 1.23 (s, 9H, C(CH3)3), 3.09 (s, 18H, N(CH3)2);
IR (neat, KBr, cm-1) 2930 b, 2870 b, 2830 b, 2780s, 2700 w, 1445 b, 1420 m, 1350 w, 1250 s, 1145 s, 1120 m, 1055m, 940 s, 790 m, 590 s.
Synthesis: Ti(NMe2)4 / hexane (6.18 mmol) was mixed with LitBu/hexane (7.14 mmol) at 0°C. After warming to RT, the mixture was filtered, solvent evaporated, leaving dark orange oil. After vacuum distillation, Ti(NMe2)3(tBu) yield 60% was obtained.
Ti(NMe2)3(tBu) was applied as singles source Ti/N/C precursor for the Ti(N,C,O) growth on glass and Si substrates by APCVD at growth temperature Tdep
300-400°C, precursor evaporation temperature Tprec 60°C, using N2 carrier (linear flow 1.4 m/min). Smooth adhererent Ti(N,C,O) films even at 300°C growth temperature were obtained, at growth rate ~22-25
nm/min. Ti(N,C,O) films were amorphous, according to XRD, their composition as per electronic microprobe was Ti0.20-0.24N0.22-0.27C0.29-0.36O0.29-O0.13, by XPS: Ti0.20-0.24N0.22-0.27C0.29-0.36O0.29-O0.13 [[i]]
[i] Bradley, D. C.; Thomas, I. M. J. Chem. Soc. 1960, 3857. (b) Bradley, D. C.; Torrible, E. G. Can. J. Chem. 1963, 41, 134.