Encyclopedia of (MO)CVD and ALD precursors
Tin bis(ethyl-1,2-dithiolate) Sn(SCH2CH2S)2 was applied as precursor for the growth of tin sulfides in the presence of hydrogen sulfide by aerosol-assisted CVD. SnS2, Sn2S3, or SnS phase was obtained, depending on the substrate temperature. [4]
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