Encyclopedia of (MO)CVD and ALD precursors
Fig. TGA-DSC of Zr diketiminate Zr(H2NacNac)4
Zirconium homoleptic tetrakis- diketiminates , such as Zr(H2NacNac)4 , have low volatility (high residues in TGA) and were considered to be not suitable precursors for MOCVD.
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