Encyclopedia of (MO)CVD and ALD precursors

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ZIRCONIUM GUANIDINATES AMIDES

Fig. Zr guanidinate structure

Fig. Zr guanidinate structure

Alkylamidozirconium guanidinates such as Zr(NEt2)2(iPr-Me2-GUA)2 & Zr(NMe2)2(iPr-Me2-GUA)2 have low volaility, low thermal stability (mp 167-169°C with decomposition, Fig.) and were not considered as promising ALD/CVD precursors [568]

Fig. TGA of Zr guanidinate amide Zr(NMe2)2(iPr-Me2-GUA)2

Fig. TGA of Zr guanidinate amide Zr(NMe2)2(iPr-Me2-GUA)2

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