Distrontium dititanium tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionate) oktakis(isobutoxide) Sr2Ti2(thd)4(OiBu)8 complex was synthesized
and characterized by various techniques including multivariate evaporation analysis. It proved to be highly volatile precursor (attributed to iso-butoxide ligand combining proper ligand size with the sterical requirements). The evaporation of Sr2Ti2(thd)4(OiBu)8
is associated with complete decomposition into homometallic species, which, however, are evaporated in a single step. This permitted to successfully use Sr2Ti2(thd)4(OiBu)8 as novel single-source precursor for
the deposition of SrTiO3 thin film by direct liquid injection (DLI) MOCVD in broad temperature range. 100 nm thick SrTiO3 films having high permittivity were obtained on Si(100) after optimization of experimental conditions. [[i]]
[i] G.A. Seisenbaeva, S. Gohil, V.G. Kessler, M. Andrieux, C. Legros, P. Ribot, M. Brunet, E. Scheid, Appl. Surf. Sci., 2011, Vol.257, Iss.6, p.2281-2290, « Controlling precursor stability and evaporation through molecular design. Pseudo single source precursor approach to MOCVD SrTiO3 thin films », doi.org/10.1016/j.apsusc.2010.09.090, https://www.sciencedirect.com/science/article/pii/S0169433210013255
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