Encyclopedia of (MO)CVD and ALD precursors
Alkylzinc halides MeZnF, MeZnCl, MeZnBr, MeZnI, EtZnF, EtZnCl, EtZnBr, EtZnI were proposed as potential precursors for Zn-containing thin films by CVD [[i]]
[i] Jang, Hyuk-kyoo, Kim, Hyun-chang, US20070190247, US7858144
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