Zinc 2-methoxymethyl-propanolato 2,2,6,6-tetramethyl-3,5-heptanedionate Zn(mmp)(thd) is a white solid with thermal pyrolysis temperature ~148°C in air (according to TGA). It has been synthesized in 98% yield by the reaction of diethylzinc solution in hexane with 1 eq. mmpH at 0°, followed by the low temperature reaction with thdH for 3 hours.
Zn(mmp)(thd), in combination with O2 as oxidant,was applied for the preparation of ZnO thin films by CVD at 500°C/ 10 Torr (with precursor evaporation temperature 170°C) on Si(l 11), Si(100), ZnO buffer/Si(100), Pt/Ti/SiO2/Si were used as substrates. EDX analysis revealed no impurities in the detectable level. ZnO films with best crystalline quality were grown on Si(111).[[i]]
[i]US Patent 7514586.