The simplest gallium hydride-amide   gallium dihydride-amide trimer (cyclotrigallazane) [H2GaNH2]3 is unsuitable as CVD precursor due to rapid polymerization in the solvent-free state resulting in non-volatile product {-(H)GaN(H)-}n. [[i]]

However, some substituted gallium dialkylamide dihydrides like H2GaN(CH2CH2NMe2)2 are volatile and useful as precursors for MOCVD applications.

 

[i] J.F. Janik, R.L. Wells, Inorg. Chem., 1997, 36, 4135-4137

BIS(2-DIMETHYLAMINOETHYL)-AMIDO GALLANE H2Ga-N(CH2CH2NMe2)2

Bis(2-dimethylaminoethyl)-amido gallane,H2GaN(CH2CH2NMe2)2  is a volatile non-pyrophoric low-melting solid (mp.27°C) with vapor pressure 0.20Torr 40°C; it is monomer in crystal and was considered as a potential gallium CVD precursor. However, its stability is limited to 48h at 55°C/1atmN2 in glass vial, and to 24h at 50°C/1atmN2 upon contact with stainless steel, then gradual decomposition starts [425]

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