An example of volatile titanium halides-hydrazides was presented by Winter at al. [[i]] [TiCl2(NNMe2)(NH2NMe2)]2
was reported to sublime at 125-150°C in vacuo and to produce cubic TiN films at 400-600°C. XPS revealed no C or Cl contamination (2%).
[i] C.H. Winter, T. S. Lewkebandara, K.C. Jayaratne, United States Patent 5591483, 1994