A new CVD/SLD precursor bis[bis(trimethylsilyl)amido] Strontium Sr(tmsa)2, displays outstanding physical properties including low melting point and high volatility. The deposition of strontium-containing oxides can be obtained at lower temperature than in the prior art with conventional and improved strontium metal-organic compounds. Sr(tmsa)2 has a melting point of 90°C, which makes it distribution in vapour phase particularly suitable [241]