A series of silver pyrazolate complexes [Ag(tfpz)]3 (1), [Ag(fbpz)]3 (2), [Ag(dbpz)]3 (3), and [(py)Ag(tfpz)]2 (4) were synthesized and characterized, where tfpz = 3,5-(CF3)2-pz, 3-tBu-5-(CF3)-pz = fbpz, dbpz = 3,5-(tBu)2-pz. Microanalysis and spectroscopic methods were applied for the characterization of the obtained silver complexes. The CF3-substituted complex [Ag(tfpz)]3 (1), demonstrated the highest volatility and stability against thermal decomposition.
[Ag(3,5-(CF3)2-pz)]3 ( [Ag(tfpz)]3 ) was applied for the
deposition of metal Ag films on Si substrates by low pressure CVD in H2 atmosphere at 250–350 °C. Silver metal thin films were successfully grown, their surface morphologies were studied by SEM, and their atomic composition as well as the
crystallite packing were investigated by XPS and XRD.[i]
[i] Y. Chi, E. Lay, T.-Y. Chou, Y.-H. Song, A. J. Carty, Chem. Vapor Dep., 2005, Vol.11, Iss. 4, p.206–212, “Deposition of Silver Thin Films Using the Pyrazolate Complex [Ag(3,5-(CF3)2C3HN2)]3”