ANTIMONY MONOHYDRIDES DIALKYLS (DIALKYLSTIBINES)

Antimony monohydrides-dialkyls (dialkylstibines) were tested as Sb precursors  for MOCVD , for example SbH(CH2CMe3)2 and SbHiBu2. [4]

Dimethylstibine SbMe2H decomposes at room temperature above -78°C, and cannot be sed as antimony MOCVD precursor.

Dicyclohexylstibine also is thermally unstable (when trying to distill it, decomposes over 75°C at 1 Torr).

Bis(tert-butyl)stibine Sb(tBu)2H has only marginal volatility for MOCVD purposes (1 Torr at 24-25°C) and was synthesized only on low yields (17%).

 Bis(neopentyl)antimony hydride (dineopentylstibine), despite its even lower volatility, was successfully tested as antimony MOCVD precursor.

Bis(neopentyl)antimony hydride (dineopentylstibine)

Bis(neopentyl)stibine SbNep2H was synthesized by the reduction of Sb(Nep)2I using LiAlH4.

SbNep2H has relatively low vapor pressure – only 0.5Torr/24°C, however it was possible to be applied for preliminary tests as MOCVD precursor of Sb-contaning thin films. [[i]]

[i] D. Greg Hendershot, John C. Pazik, and Alan D. Berry, Chem. Mater., 1992, 4 (4), pp 833–837, DOI: 10.1021/cm00022a017, « Synthesis, characterization, and chemical vapor deposition properties of primary and secondary neopentylstibine. New antimony precursors for MOCVD », https://pubs.acs.org/doi/abs/10.1021/cm00022a017?journalCode=cmatex

Share this page