SILICON PRECURSORS | mocvd-precursor-encyclopedia.de

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Aluminum precursors
- ALKYLS-β-DIKETONATES
- ALKYLS β-DIKETONATES
- Al HYDRIDES (ALANES)
- Al ALKYLS-HYDRIDES
- Al Hydrid-Borhydrid
- ALUMINUM BORHYDRIDES
- ALUMINUM HALIDES
- ALKYLALUMINUM HALIDE
- ALUMINUM ALKYLS
- Al ALKYLS-ALKOXIDES
- ALUMINUM ALKOXIDES
- Al AMINOALKOXIDES
- ALUMINUM ALKYLAMIDES
- ALUMINUM HYDRAZIDES
- AL β-DIKETONATES
ANTIMONY PRECURSORS
- ANTIMONY THIOLATES
- ANTIMONY CARBAMATES
- ANTIMONY ALKOXIDES
- Cp-ANTIMONY HALIDES
- TETRAALKYLDISTIBINES
- HYDRIDES-DIALKYLS
- Sb AZIRIDINIDES
- Sb GUANIDINATES
- DIALKYLSILYLAMIDES
- Sb DIALKYLAMIDES
- ALKYLS(ALKYLSTIBINES
- DIHYDRIDES-ALKYLS
- Sb HYDRIDE (STIBINE)
- ANTIMONY HALIDES
- Sb-Te PRECURSORS
Arsenic precursors
- ELEMENTAL ARSENIC
- ARSENIC HALIDES
- ARSINE
- ALKYLARSINES
- ARSENIC ALKYLAMIDES
Barium precursors
- BARIUM HALIDES
- Ba cyclopentadienyls
- BARIUM β-DIKETONATES
- Ba β-KETOIMINATES
- Ba β-DIKETIMINATES
- Ba pyrazolylborates
Beryllium precursors
- Beryllium metal
- Beryllium halides
- Beryllium alkyls
- Be cyclopentadienyls
- Be β-diketonates
- Be oxo–carboxylates
BISMUTH PRECURSORS
- BISMUTH AMIDINATES
- ALKYLSILYLAMIDES
- IMINO-P-CHALCOGENIDE
- Bi β-DIKETONATES
- BISMUTH ALKOXIDES
- BISMUTH ARYLS
- BISMUTH ALKYLS-ARYLS
- BISMUTH ALLYLS
- BISMUTH ALKYLS
BORON PRECURSORS
- AMMONIA BORANE
- Borazine B3N3H6
- OCTAHYDRIDOTRIBORATE
- TETRAHYDRIDOBORATES
- BORON HYDRIDES
- BORON HALIDES
- BORON ALKOXIDES
Calcium precursors
- Ca precursors Table
- Ca cyclopentadienyls
- Ca alkylsilylamides
- Ca β-DIKETONATES
- Ca β-DIKETIMINATES
Carbon precursors
- ALKANES
- ALKENES
- ALKYNES
- HALOSILYLALKANES
- KETONES
- ALIPHATIC AMINES
- POLYCYCLIC ARENES
- HETEROCYCLIC COMPOUN
CERIUM PRECURSORS
- Ce CYCLOPENTADIENYLS
- CERIUM ALKOXIDES
- CERIUM β-DIKETONATES
- Ce β-KETOIMINATES
Cesium precusors
- Cs Lantanide precurs
- Cs ALKYLSILYLOXIDES
- CESIUM ALKOXIDES
- Cs ALKYLSILYLAMIDES
- CESIUM AMIDE
- CESIUM TELLURIDES
- CESIUM OXIDES
- CESIUM HALIDES
- CESIUM METAL Cs
- CESIUM β-DIKETONATES
Chromium precursors
- Comparison Cr precur
- Cr CARBOXYLATES
- Dialkyldithiocarbama
- Cr β-DIKETONATES
- CHROMIUM ALKOXIDES
- CHROMIUM AMIDINATES
- CHROMIUM ALKYLAMIDES
- CrCycloheptatrienyls
- Cr CYCLOPENTADIENYLS
- CHROMIUM PENTADIENYL
- CHROMIUM ALKYLS
- CHROMIUM BIS(ARENES)
- CHROMIUM CYCLOHEPTAT
- CHROMIUM ARENES-CARB
- CHROMIUM TETRAALKYLB
- CHROMIUM BORHYDRIDES
- CHROMIUM NITRATES
- CHROMIUM OXYHALIDES
- CHROMIUM OXIDES
- CHROMIUM CARBONYLS
- Cr (PF3)x carbonyls
- Trifluorophosphines
- Cr Cp carbonyls
- CHROMIUM HALIDES
COBALT PRECURSORS
- COBALT CARBOXYLATES
- Co(III)β-DIKETONATES
- Co(II) β-DIKETONATES
- Co ALKYLAMIDINATES
- Co CYCLOPENTADIENYLS
- Co Cp CARBONYLS
- HYDRIDE ALKYLPHOSPHI
- Co HYDRIDE-CARBONYLS
- Co ALLYLS CARBONYLS
- ALKYLS CARBONYLS
- CARBINES CARBONYLS
- Co ALKYNES CARBONYLS
- COBALT CARBONYLS
- COBALT NITRATES
- COBALT HALIDES
- Co NITROSYL CARBONYL
- Co-Si SINGLE-SOURCE
- Co-Al SINGLE-SOURCE
DYSPROSIUM PRECURSOR
- DYSPROSIUM AMIDINATE
- DYSPROSIUM β-DIKETON
- DYSPROSIUM ALKOXIDES
- Dy CYCLOPENTADIENYLS
- DYSPROSIUM HALIDES
ERBIUM PRECURSORS
- Er ALKYLXANTHATES
- Er ALKYLAMIDINATES
- ERBIUM NITRATES
- ERBIUM PYRAZOLATES
- Er ALKYLSILYLAMIDES
- CYCLOPENTADIENYLS
- ERBIUM β-DIKETONATES
- ERBIUM GUANIDINATES
Gadolinium precursor
- Gd β-DIKETONATES
- Gd ALKYLGUANIDINATES
- ALKYLSILYLAMIDES
- Oxo alkoxides
- GADOLINIUM ALKOXIDES
- Cp ALKOXIDES
- Gd CYCLOPENTADIENYLS
- ALKYLAMINODIBORANATE
- GADOLINIUM NITRATE
- GADOLINIUM HALIDES
Gallium precursors
- ALKYL-THIOCARBOXYLAT
- DISELENOCARBAMATES
- DIALKYLDITHIOCARBAMA
- ALKYL-DITHIOCARBAMAT
- DIALKYLTHIOCARBAMATE
- Gallium DIESTERATES
- Ga β-DIKETONATES
- AlkylGa βDIKETONATES
- GaTePHOSHORYLAMIDES
- GaSePHOSPHORYLAMIDES
- ALKYLGA –SULFIDES
- ALKYLGa TELLURIDES
- ALKYLGa SELENIDES
- ALKYLGaALKYLSULFIDES
- Ga ALKYLTIOLATES
- DIALKYLGa ALKOXIDES
- Ga ALKOXIDES HALIDES
- GALLIUM HYDRAZIDES
- GALLIUM ALKYLAMIDES
- Ga ALKYLS HYDRAZIDES
- Ga DITHIOCARBAMATES
- GALLIUM ALKYLS
- Ga ALKYLS-AZIDES
- ALKYLGALLIUM HALIDES
- Ga HALIDES-AZIDES
- HYDRIDE-AZIDE-HALIDE
- Ga HYDRIDES-AZIDES
- HYDRIDE-ALKYL-AMIDES
- Ga HYDRIDES-AMIDES
- Ga hydrides/adducts
- [NO2][Ga(NO3)4]
- GALLIUM HALIDES
- METALLIC Ga
- ALKYLGALLIUM AMIDES
- GALLIUM ALKOXIDES
Hafnium precursors
- Hf(IV) AMIDINATES
- Comparison Hf precur
- Hf β-KETOESTERATES
- Hf β-DIKETONATES
- ALKOXIDE-DIKETONATES
- HAFNIUM OXOALKOXIDES
- HAFNIUM ALKOXIDES
- Hf HYDROXYLAMIDES
- GUANIDINATES-AMIDES
- HAFNIUM ALKYLAMIDES
- AMIDES CYCLOPENTADIE
- ALKYLS Cp ALKOXIDES
- ALKYL CYCLOPENTADIEN
- Hf TETRAHYDROBORATES
- Hafnium NITRATES
- Hafnium HALIDES
Indium precursors
- ALKYLS-β-DIKETONATES
- INDIUM β-DIKETONATES
- ALKYLS-ALKOXIDES
- CYCLOPENTADIENYLS
- AMINOALKYLS-AZIDES
- AMINOALKYLS-ALKYLS
- INDIUM ALKYLS
- INDIUM ALKYLS-AZIDES
- SELENIDES ALKYLS
- ALKYL-ALKYLSELENIDES
- ALKYL-ALKYLTHIOLATES
- ALKYLINDIUM HALIDES
- INDIUM HALIDES
IRON PRECURSORS
- Fe(CO)x CYCLOALKENES
- IRON CARBONYLS-DISUL
- IRON β-DIKETONATES
- IRON β-KETOESTERATES
- IRON ALKOXIDES
- IRON AMIDINATES
- Fe CYCLOPENTADIENYLS
- TRIHALOSILYLS (CO)x
- IRON CARBONYLS
- TRIFLUOROPHOSPHINES
- IRON HALIDES
Lithium precursors
- Standard page
- LI β-DIKETONATES
- TRIALKYLSILYLAMIDES
- LI DIALKYLAMIDES
- LITHIUM ALKOXIDES
- Li CYCLOPENTADIENYLS
- LITHIUM ARYLS
- LITHIUM ALKYLS
- LITHIUM NITRIDES
- Li-Nb ALKOXIDES
- LiNb ALKOXID DIKETON
- Li-Ta ALKOXIDES
LEAD PRECURSORS
- LEAD CARBOXYLATES
- DIALKYLDITHIOCARBAMA
- DISULFOIMIDODIPHOSPH
- LEAD β-DIKETONATES
- LEAD ALKYLS-ALKOXIDE
- LEAD ARYLS
- LEAD ALKYLS
- LEAD CARBONATES
- LEAD ALKOXIDES
Magnesium precursors
- Mg DIALKYLCARBAMATES
- Mg CARBOXYLATES
- MgCp β-DIKETIMINATES
- Mg β-KETOIMINATES
- Mg β-DIKETONATES
- Mg ALKYLS-ALKOXIDES
- Mg alkylamidinates
- Magnesium metal
- MAGNESIUM HALIDES
- Mg BORHYDRIDES
- MAGNESIUM ALKYLS
- Mg Cyclopentadienyls
MANGANESE PRECURSORS
- Mn CARBOXYLATES
- Mn ANTHRANILATES
- Mn ALKYLXANTHATES
- Mn DITHIOCARBAMATES
- Mn β-DIKETONATES
- Mn ALKYLMERCURIDES
- Mn ALKYLTELLURIDES
- Mn ALKYLAMIDINATES
- Mn ALKYLSILYLAMIDES
- Mn CYCLOPENTADIENYLS
- Mn HYDRIDES-Cp
- Mn AlkylCp carbonyls
- Mn ACYLS-CARBONYLS
- Alkyl Mn CARBONYLS
- MANGANESE CARBONYLS
- MANGANESE HALIDES
- MANGANESE NITRATES
- Manganese metal
- Mn HALIDES-CARBONYLS
NICKEL PRECURSORS
- Ni ALKYLXANTHATES
- Ni-Sn ALKOXIDES
- IMIDOTHIOPHOSPHINATE
- Ni DITHIOCARBAMATES
- NICKEL OXIMATES
- Ni β-KETOIMINATES
- Ni AMINOALKOXIDES
- NICKEL β-DIKETONATES
- Ni CYCLOPENTADIENYLS
- Cp ALLYLS
- NICKEL CARBONYLS
- NICKEL AMIDINATES
NIOBIUM PRECURSORS
- ALKYLIMIDE-ALKOXIDES
- NIOBIUM CARBOXYLATES
- NIOBIUM ALKOXIDES
- β-DIKETONATES
- ALKOXIDE-β-DIKETONAT
- NIOBIUM ALKYLAMIDES
- ALKYLIMIDE-ALKYLAMID
- AMIDINATE IMID AMIDE
- HYDRAZID–IMID-HALIDE
- HYDRAZIDE-IMIDE-AMID
- Nb CYCLOPENTADIENYLS
- NIOBIUM (0) ARYLS
- NIOBIUM HALIDES
- IMIDES-AMIDES-HALIDE
POTASSIUM PRECURSORS
- K-Nb ALKOXIDES
- β-DIKETONATES
- POTASSIUM ALKOXIDES
STRONTIUM PRECURSORS
- Sr-Ti PRECURSORS
- Sr β-KETOIMINATES
- Sr β-DIKETONATES
- Trialkylsilylamides
- Sr CYCLOPENTADIENYLS
RUBIDIUM PRECURSORS
- Rb β-DIKETONATES
- Rb ALKYLSILYLOXIDES
- RUBIDIUM ALKOXIDES
SILICON PRECURSORS
- TRIHALOSILANES
- AMINODISILANES
- AMINOSILANES
- Cp SILANES
- SILACYCLOALKANES
- ALKYLARYLSILANES
- ALKYLSILANES
- HALOALKYLVINYLSILANS
- HALODISILANES
- TETRAHALOSILANES
- Si HYDRIDES (SILANES
Silver precursors
- SILVER PYRAZOLATES
- PHOSPHORYLTHIOUREATE
- Ag OXYCHINOLINATES
- SILVER SUCCINIMIDE
- SILVER AMIDINATES
- Ag(I) CARBOXYLATES
- SILVER β-DIKETONATES
- SILVER PERFLUORARYLS
- Ag PERFLUORVINYLS
- Ag PERFLUORALKYLS
- SILVER HALIDES
SODIUM PRECURSORS
- Na CYCLOPENTADIENYLS
- ALKYLSILYLAMIDES
- SODIUM ALKOXIDES
- SODIUM β-DIKETONATES
- NaCuAlkoxidDiketonat
- Na-Nb ALKOXIDES
- Na-Cu ALKOXIDES
- NaYAlkoxideDiketonat
- Na-Y ALKOXIDES
RHODIUM PRECURSORS
- RHODIUM NITRATE
- RHODIUM HALIDES
- RHODIUM PYRROLYLS
- RHODIUM PYRAZOLATES
- ALKYLDITHIOCARBAMATE
- RHODIUM CARBONYLS
- RHODIUM ALLYLS
- DIKETONATE-CARBONYLS
- Cp ALKENES
- Cp CYCLOOCTADIENES
- Cp CARBONYLS
- ALLYLS CARBONYLS
- HALIDES-PF3
- HYDRIDES-PF3
- RHODIUM βDIKETONATES
- RHODIUM CARBOXYLATES
TELLURIUM PRECURSORS
- ALKYLTELLUROLATES
- HETEROCYCLIC COMP.
- Te (IV) AMIDINATES
- Te(IV) DIALKYLSILYLS
- DIALKYLDITELLURIDES
- TELLURIUM AMIDES
- ALKYLGERMYLS
- Te(II)TRIALKYLSILYLS
- TELLURIUM ALKYLS
Tin MOCVD precursors
- Sn-Co precursors
- CARBOXYLATES ALKYLS
- TIN β-DIKETONATES
- β-DIKETONATE-HALIDES
- TIN ALKYLDITHIOLATES
- TIN ALKOXIDES
- TIN ALKYLAMIDES
- TIN(III) TRIALKYLS
- TIN TETRAALKYLS
- TRIALKYLSTANNANES
- DIALKYLSTANNANES
- MONOALKYLSTANNANES
- TIN ALKYLS-HALIDES
- TIN TETRAHALIDES
- TIN NITRATES
- TIN HYDRIDES
TITANIUM PRECURSORS
- TITANIUM AMIDINATES
- AMIDINATES ALKOXIDES
- ALKOXYKETOIMINATES
- Ti(III)β-DIKETONATES
- AMIDES β-DIKETONATES
- ALKOXIDE βDIKETONATE
- TITANYL β-DIKETONATE
- TITANYL βKETOESTERAT
- ALKOXIDE KETOESTERAT
- DIOLATE KETOESTERATE
- DIOLAT AMINOALKOXIDE
- TITANIUM ALKOXIDES
- Ti AMINOALKOXIDES
- ALKOXID-STANNYLAMIDE
- ALKOXIDE-ALKYLAMIDES
- PYRROLYLS-ALKOXIDES
- PYRROLYL-ALKYLAMIDES
- Ti(IV) ALKYLAMIDES
- IMIDES-AMIDES
- ALKYLS- ALKYLAMIDES
- Cp ALKYLAMIDES
- Cp ALKOXIDES
- Ti Cp HALIDES
- Cp - CARBONYLS
- Ti CYCLOPENTADIENYLS
- Ti (II) PENTADIENYLS
- TITANIUM ALKYLS
- ALKYLS-ALKYLAMIDES
- Ti HALIDES-AMIDES
- HALIDES-HYDRAZIDES
- HALIDES-ALKYLS
- Ti HALIDES ADDUCTS
- TITANIUM HALIDES
- TITANIUM (0) ARENES
- Ti(0) HETEROADDUCTS
- TITANIUM METAL
- Ti nitrate Ti(NO3)4
- TETRAHYDRIDOBORATES
Vanadium precursors
- Cp-CARBONYLS
- HALIDES-SELENOETHERS
- HALIDE-DISELENOETHER
- Cp ALKYLSELENOLATES
- VANADYL βDIKETONATES
- VANADYL ALKOXIDES
- VANADIUM ALKOXIDES
- VANADIUM ALKYLAMIDES
- VANADIUM ARENES
- V CYCLOPENTADIENYLS
- V CYCLOPENTADIENYLS
- VANADIUM OXYHALIDES
- VANADIUM HALIDES
YTTRIUM PRECURSORS
- Y β-DIKETONATES
- ALKYLAMIDINATES
- YTTRIUM GUANIDINATES
- Y CYCLOPENTADIENYLS
- ALKYLAMINODIBORANATE
Zinc precursors
- ZINC ALKYLXANTHATES
- DIALKYLDITHIOCARBAMA
- ALKYL DISELENOCARBAM
- ALKYLS-DITHIOCARBAMA
- Zn DIALKYLCARBAMATES
- ZINC OXOCARBOXYLATES
- ZINC CARBOXYLATES
- ZINC β-KETOESTERATES
- ZINC β-DIKETONATES
- ALKOXIDE DIKETONATES
- ALKYLZINC ALKOXIDES
- ZnAlkylSilylTellurid
- Zn ALKYLSILYLAMIDES
- ZINC DIALKYLAMIDES
- AlkylZnDIALKYLAMIDES
- AlkylZn EtherAdducts
- AlkylZn AmineADDUCTS
- ZINC ALKYLS
- ZINC ALKYLS-HALIDES
- ZINC METAL
- ZINC HALIDES
- ZINC NITRATES
Zirconium precusors
- GUANIDINATES AMIDES
- DIKETIMINATES AMIDES
- Zr(IV) diketiminates
- Zr (IV) ketominates
- Zr β-DIKETONATES
- DIKETONATE ALKOXIDES
- ZIRCONIUM ALKOXIDES
- Zr DIALKYLAMIDES
- Zr Cp ALKYLAMIDES
- Zr CYCLOPENTADIENYLS
- Zr Cp ACETYLIDES
- ZrCp ALKYL ALKOXIDES
- Zr Cp ALKYLS
- Zr Cp HYDRIDE ALKYLS
- Zr Cp carbonyls
- Zr Cpx (BH4)1-x
- Zr AlkylCp HALIDES
- ZIRCONIUM ALKYLS
- Zr ALKYLS- HALIDES
- Zr TETRAHYDROBORATES
- Zirconium HALIDES
TUNGSTEN PRECURSORS
- GUANIDIN-IMID-HYDRID
- AMIDINATE-IMID-AMIDE
- TUNGSTEN (VI) ALKYLS
- KETOMINATE OXOALKOXY
- HYDRAZIDES - HALIDES
- IMIDES AMIDINATES
- IMIDES-AMIDES
- KETOESTERAT OXOALKOX
- DIKETONATE OXOALKOXY
- W (VI) OXOALKOXIDES
- W (V) ALKOXIDES
- W (VI) ALKOXIDES
- TUNGSTEN ARYLOXIDES
- IMIDES-HALIDES
- ALKYLS Cp CARBONYLS
- CYCLODIENE-CARBONYLS
- CYCLOTRIENE CARBONYL
- HYDRIDE Cp CARBONYLS
- ARENES-CARBONYLS
- W(IV) Cp HYDRIDES
- TUNGSTEN ALLYLS
- TUNGSTEN BIS(ARENES)
- CARBONYL-ISONITRILES
- TUNGSTEN CARBONYLS
- GUANIDINAT-IMID-AMID

Silicon CVD-ALD precursors