Titanium tetrachloride bis(ammonia) adduct TiCl4(NH3)2

      Titanium tetrachloride bis(ammonia) adduct [TiCl4 (NH3)2] was reported to be an improved single-source precursor for the growth of titanium nitride TiN films [[i]]

 [i] Winter, et al, Inorganic Chemistry, vol. 33, No. 6, 1994 pp. 1227-1229, “"[TiCl4 (NH3)2 ]: An Improved Single-Source Precursor to Titanium Nitride Films",

Titanium tetrachloride bis(cyclohexylphosphine) adduct TiCl4(CyPH2)2

      Titanium tetrachloride bis(cyclohexylphosphine) adduct TiCl4(CyPH2)2 is a volatile moisture-sensitive yellow crystalline solid with vapor pressure 1-2 Torr at 25°C (subliming at 100°C/0.1 Torr) and melting at 119°C (with decomposition). It has been synthesized by reaction of TiCl4 with 2 equivalents of cyclohexylphosphine in hexane at RT, followed by solvent evaporation, with yield 98%.. [716]

Characterisation: IR: sharp P-H stretching peaks 2379, 2376 cm-1.

    1H NMR: δ 4.21 (doubl. of doubl., JP-H 321 Hz, JH-H 5.1 Hz) + multipl of Cy protons (δ 2.25, 2.17, 1.81).

     13C NMR: 33.06 (d, JP-C 4.3 Hz), 31.19 (d, JP-C 13.6 Hz), 31P NMR: singl. -40.60 ppm.

TiCl4(CyPH2)2 for TiP by CVD

     TiCl4(CyPH2)2  has been applied for the growth if titanium phosphide (TiP) films on glass (Corning 759) or silicon substrates by low pressure CVD (0.1 Torr dynamic vacuum) at 350-600°C temperatures. [716]

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