Titanium 2,5-dimethylpyrrolyl tris(dimethylamide) [Ti(Me2C4H2N)(NMe2)3] was synthesized and characterized. The structure of complex [Ti(Me2C4H2N)(NMe2)3]
is pseudo-tetrahedral monomeric and contains N-σ bonded 2,5-dimethylpyrrolyl ligand, as determined by single-crystal XRD. [Ti(Me2C4H2N)(NMe2)3] (and for comparison [Ti(Me2C4H2N)(µ2-OiPr)(OiPr)2]2 ) was studied as precursor for the TiO2 deposition
by liquid injection MOCVD. The use of [Ti(Me2C4H2N)(NMe2)3] as precursor resulted in much larger carbon contamination (C = 12.7 at.-%) in the TiO2 layers grown at 450 °C, as compared to
those deposited from [Ti(Me2C4H2N)(µ2-OiPr)(OiPr)2]2 (C = 6.1 at.-%); the titania layers grown at 450 °C were X-ray amorphous.[i]
[i] K. Black, A.C. Jones, J. Bacsa, P.R. Chalker, P.A. Marshall, H.O. Davies, P.N. Heys, P. O'Brien, M. Afzaal, J. Raftery, G.W. Critchlow, Chem. Vapor Dep., 2010, Vol. 16, Iss. 1-3, p.93–99. « Investigation of New 2,5-Dimethylpyrrolyl Titanium Alkylamide and Alkoxide Complexes as Precursors for the Liquid Injection MOCVD of TiO2 », http://onlinelibrary.wiley.com/doi/10.1002/cvde.200906818/abstract