Tris(t-butyl-3-oxo-butanoato)iron(III) was synthesized as a novel Fe MOCVD precursor. The thermal properties of the new precursor were studied by thermogravimetry and differential thermal analysis.
Tris(t-butyl-3-oxo-butanoato)iron(III) was applied as for the growth
of thin iron oxide layers FeOx on glass substrates by low-pressure MOCVD. The grown layers were characterized by XRD, TEM, SEM and optical measurements. The films grown at substrate temperatures <550 °C
and at low O2 flow rates contained only the magnetite phase Fe3O4, according to XRD. An increasing proportion of α-Fe2O3 vs. Fe3O4 was formed at higher temperatures and at higher O2 flow rates. Varying morphologies magnetite layers were grown using varying
oxidant – O2 or nitrous oxide N2O, according to SEM. [i]
[i]K Shalini, G.N Subbanna, S Chandrasekaran, S.A Shivashankar, Thin Solid Films, 2003, Vol. 424, Iss.1, p. 56-60, “Thin films of iron oxide by low pressure MOCVD using a novel precursor: tris(t-butyl-3-oxo-butanoato)iron(III) “, https://www.sciencedirect.com/science/article/pii/S0040609002009033