TITANIUM CYCLOPENTADIENYLS-ALKYLAMIDES

Titanium cyclopentadienyl tris(dimethylamide) Ti(Cp)(NMe2)3 (“TyALD”)

Titanium pentamethylcyclopentadienyl tris(dimethylamide) Ti(Me5Cp)(NMe2)3 (“StarTyALD”)

Ti(Cp)(NMe2)3 (“TyALD”), Ti(Me5Cp)(NMe2)3 (“StarTyALD”) for SrTiO3 by ALD

      Titanium cyclopentadienyl-alkylamide precursors TiCp(NMe2)3 (TyALD) and  Ti(Me5Cp)(NMe2)3 (StarTyALD), and for comparison titanium cyclopendadianyls-alkoxides Ti(MeCp)(OMe)3 (PrimeTi) and (Ti(Me5Cp)(OMe)3 (StarTi), were tested as precursors for the growth of SrTiO3 layers by ALD (combined with several Sr precursors (Sr(iPr3Cp)2 (AbsoluteSr), Sr(iPr3Cp)2·2THF (HyperSr.THF), Sr(iPr3Cp)2.DME (HyperSr.DME), Sr(Me5Cp)2.THF (StarSr.THF), Sr(Me5Cp)2.DME (StarSr.DME)), in which the effect of stabilizing adducts on the properties of Sr cyclopentadienyl precursors and SrO ALD process was evaluated. The compatibility of TiCp(NMe2)3 and  Ti(Me5Cp)(NMe2)3 precursors with with Sr(iPr3Cp)2·2THF in terms of composition tunability and material properties of the grown SrTiO3 layers were investigated.[i]

[i] R. Katamreddy, Z. Wang, V. Omarjee,  P.V. Rao,  Ch. Dussarrat,  N. Blasco, ECS Trans. 2009, Vol.19, Iss.2,  525-536, «  Advanced Precursor Development for Sr and Ti Based Oxide Thin Film Applications », doi: 10.1149/1.3122114, http://ecst.ecsdl.org/content/19/2/525.short 

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