Homoleptic antimony (III) aziridinide Sb2(Azn)6 (Azn = cyclo-NC2H4), was synthesized by an amide group exchange reaction between Sb(NMe2)3 and 3 equivalents of aziridine;
the obtained complex was structurally characterized by single-crystal XRD. Sb2(Azn)6 is a low-melting solid; it exhibits a “weak dimer” structure in the crystal. [i]
[i] N. Harmgarth, Ph. Liebing, F. Zörner, M. Silinskas, E.P. Burte, F.T. Edelmann, Inorg. Chem., 2017, 56 (8), pp 4267–4270, DOI: 10.1021/acs.inorgchem.7b00523, « Synthesis and Crystal Structures of the First Antimony(III) Aziridinides »
Tris(aziridinyl)antimony (III) (Sb[cyclo-NC2H4]3) , combined with Te(nBu)2 as Te source, was applied
as antimony precursors for the deposition of Ge-Sb-Te (GST) thin films by plasma ALD. One of the advantage of this precursor is that it is halogen-free. As the Sb2(Azn)6 precursor contains N in the molecule, the as-deposited GST films were nitrogen-doped. Relatively conformal filling of trenches with
GST layers was obtained: the film thickness ratio between the top and the wall/bottom of trenches was for dbottom/dtop ≈ 0.65 for“wide” (7:1 aspect ratio) trenches, dwall/dtop > 0.63 for “narrow” (23:1 aspect ratio) trenches.[[i]]
[i] M. Šilinskas, B. Kalkofen, R. Balasubramanian, A. Batmanov, E.P. Burte, N. Harmgarth, F. Zörner, F.T. Edelmann, J. Vacuum Sci. & Technology A, 2018, vol. 36, Iss. 2, 021510 (; https://doi.org/10.1116/1.5003463 , https://avs.scitation.org/doi/10.1116/1.5003463, « Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds »