Antimony hydrides-alkyls (monoalkylstibines) reported as film growth precursors include SbH2(neopentyl) and SbH2iBu. [4]
Neopentylantimony dihydride (mononeopentylstibine) SbH2CH2CMe3 has vapor pressure 5.5 Torr/ 0°C.
Neopentylantimony dihydride (neopentylstibine) SbH2CH2CMe3, in combination with InMe3, produced InSb films by MOCVD at substrate temperatures as low as 350°C. [4]