All-N-coordinated Nb amidinates such as [Nb(NMe2){(N-iPr)2C(NMe2)}2(=N-tBu)] were tested as a single source MOCVD precursors, and metallic, golden-colored
pure δ-NbN phase layers were grown at 400-600 °C substrate temperatures under N2 atmosphere; low C impurity (<3 at.-%), but high O content (up to 15 at.-%) were found in the layers.; the specific resistivities of the grown layers were ~2000–7700
μΩ·cm.[i]
[i] A. Baunemann, D. Bekermann, T. Thiede, H. Parala, M. Winter,C. Gemel, R. A. Fischer, J. Chem. Soc, Dalton Trans. 2008, 28, 3715.