Titanium 2,5-dimethylpyrrolyl alkoxide [(Me2C4H2N)Ti(µ2-OiPr)(OiPr)2]2 was synthesized and characterized. The complex [(Me2C4H2N)Ti (µ2-OiPr)(OiPr)2]2
is dimeric containing two terminal and two bridging isopropoxy groups and terminal N-σ-bonded pyrrolyl ligands, according to single-crystal X-ray diffraction (XRD). [(Me2C4H2N)Ti (µ2-OiPr)(OiPr)2]2 (and for comparison [(Me2C4H2N)Ti(NMe2)3] ) were
investigated as precursors for the growth of TiO2 layers by liquid injection metal-organic MOCVD. Titanium oxide films deposited at 450 °C from [(Me2C4H2N)Ti(µ2-OiPr)(OiPr)2]2 contained significantly less carbon impurities (C = 6.1
at.-%) than those grown from [(Me2C4H2N)Ti(NMe2)3] (C = 12.7 at.-%). TiO2 films grown at 450 °C were amorphous, according to XRD.[i]
[i] K. Black, A.C. Jones, J. Bacsa, P.R. Chalker, P.A. Marshall, H.O. Davies, P.N. Heys, P. O'Brien, M. Afzaal, J. Raftery, G.W. Critchlow, Chem. Vapor Dep., 2010, Vol. 16, Iss. 1-3, p.93–99. « Investigation of New 2,5-Dimethylpyrrolyl Titanium Alkylamide and Alkoxide Complexes as Precursors for the Liquid Injection MOCVD of TiO2 », http://onlinelibrary.wiley.com/doi/10.1002/cvde.200906818/abstract