About author (Sergej Pasko)

Personal email:  sergejpasko@googlemail.com

Born in 1976 in Vilnius (Lithuania).

Studied inorganic and metal-organic chemistry in Vilnius University, Faculty of Chemistry.

Doctoral studies (MOCVD precursor synthesis and growth applications) in the Institut des Recherches sur la Catalyse (Lyon, France) /Vilnius University (supervision of Prof. L. Hubert-Pfalzgraf/  Prof. A.Abrutis)

Current professional activity area

2004 – present. Senior Process Engineer / Scientist (MOCVD/MOVPE) at AIXTRON SE, Aachen, Germany (>16 years experience)

Areas of Expertise:

- Metal-Organic Chemistry (Synthesis of novel metal-organic precursor of various classes (metal alkyls, alkylamides, alkoxides,β-diketonates, β-ketoiminates, β-diketiminates,...), their characterisation and MOCVD applications)

 - over 20 years experience in the research and  industrial applications of metal-organic and inorganic precursors in the areas of MOCVD / MOVPE (AIXTRON Showerhead, planetary, horizontal reactors), AVD (liquid injection MOCVD), PECVD and ALD ov various classes of materials:

-    high K oxides (HfO2, ZrO2, Al2O3, SrTaO)

-  high-temperature superconducting films (YBa2Cu3O7-x)

-   colossal magnetorestance films (La1-xSrxMnO3-δ)

-   conductive nitrides (TiN, TaN),

- GaN, AlGaN, InGaN MQW on sapphire epitaxy (for LED applications), 

- GaN-on-silicon epitaxy (for Power and RF HEMT and LED applications)  

- Arsenide-phosphide epitaxy processes for solar cell and laser applications

• GaAs, AlGaAs, InGaP, InAlP, InGaAsP on GaAs and Ge
• InP, (Al,In)GaAs, InGaAsP on InP processes

- SiGe epitaxy by CVD

- Carbon nanotubes (CNT) and graphene by PECVD (AIXTRON Black Magic reactors)

Write your message here. Fill out the form: