Silver MOCVD - ALD precursors

Chemical vapor deposition (CVD) of silver and silver-contaning thin films can find wide practical applications, e.g. in the synthesis of superconducting films. Foer example, it is known from the literature [[i]] that the addition of silver to YBa2Cu3O7-x (YBCO) thin films deposited by mist microwave-plasma CVD significantly improves their superconductivity characteristics: critical temperature, resistance, resistance, probably due to the crystalline quality improvement. Therefore, the research on finding of volatile Ag compounds is a very promising scientific trend.

 

Volatile silver compounds

Organic silver compounds are basically unstable and volatile (for example, methyl and ethyl silver decompose below room temperature). However, volatility and stability is significantly higher for the silver complexes with alkenes, especially fluorinated compounds, as well as other organo-fluorinated silver compounds.


 

[i] Takahashi N., Koukitu A., Seki H. "Effect of Ag addition on YBa2Cu3O7- Superconducting Thin Films Prepared by Microwave-Plasma Chemical Vapor Deposition," Journal of Crystal Growth, 1996, Vol.169, Iss. 3, pp.463-468.