LEAD MOCVD/ALD PRECUSORS

Interest in the CVD of lead-containing thin films has been mainly driven by the technological  importance of complex Pb-contaning oxides, including PbTiO3, piezoelectric Pb(Zr,Ti)O3, (Pb,La)(Zr,Ti)O3, Pb(Mg0.33Nb0.67)O3, and Pb(Sc0.5Ta0.5)O3. [4]