The choice of the lithium CVD precursors is limited because of the tendency of lithium compounds to form high nuclearity species having low vapor pressures. [4]

Reported lithium CVD/AVD precursors include volatile alkoxides, amides and β-diketonates.

The materials grown using lithium CVD precursors include lithium-doped diamond,  LiTaO₃, LiNbO₃,  LiNb_xTa_1–xO₃, grown using MOCVD, thermal plasma spray CVD, and PECVD[4]