Gallium precursors are widely used for MOCVD/MOVPE growth of GaAs, GaN and related Ga-containing materials for LED, semiconductor lasers and solar cell applications.[2]

The review of precursor chemistry for the growth of group III nitrides (Ga(Al,In)N) is given in the work of Neumayer and Ekerdt [340]. A review of the single source precursors (SSPs) for chemical vapor deposition to the group III metal nitrides including gallium nitride is presented in the review of Getman and Franklin [341].