Encyclopedia of (MO)CVD and ALD precursors
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Aluminum precursors
ALKYLS-β-DIKETONATES
ALKYLS β-DIKETONATES
Al HYDRIDES (ALANES)
Al ALKYLS-HYDRIDES
Al Hydrid-Borhydrid
ALUMINUM BORHYDRIDES
ALUMINUM HALIDES
ALKYLALUMINUM HALIDE
ALUMINUM ALKYLS
Al ALKYLS-ALKOXIDES
ALUMINUM ALKOXIDES
Al AMINOALKOXIDES
ALUMINUM ALKYLAMIDES
ALUMINUM HYDRAZIDES
AL β-DIKETONATES
ANTIMONY PRECURSORS
ANTIMONY THIOLATES
ANTIMONY CARBAMATES
ANTIMONY ALKOXIDES
Cp-ANTIMONY HALIDES
TETRAALKYLDISTIBINES
HYDRIDES-DIALKYLS
Sb AZIRIDINIDES
Sb GUANIDINATES
DIALKYLSILYLAMIDES
Sb DIALKYLAMIDES
ALKYLS(ALKYLSTIBINES
DIHYDRIDES-ALKYLS
Sb HYDRIDE (STIBINE)
ANTIMONY HALIDES
Sb-Te PRECURSORS
Arsenic precursors
ELEMENTAL ARSENIC
ARSENIC HALIDES
ARSINE
ALKYLARSINES
ARSENIC ALKYLAMIDES
Barium precursors
BARIUM HALIDES
Ba cyclopentadienyls
BARIUM β-DIKETONATES
Ba β-KETOIMINATES
Ba β-DIKETIMINATES
Ba pyrazolylborates
Beryllium precursors
Beryllium metal
Beryllium halides
Beryllium alkyls
Be cyclopentadienyls
Be β-diketonates
Be oxo–carboxylates
BISMUTH PRECURSORS
BISMUTH AMIDINATES
ALKYLSILYLAMIDES
IMINO-P-CHALCOGENIDE
Bi β-DIKETONATES
BISMUTH ALKOXIDES
BISMUTH ARYLS
BISMUTH ALKYLS-ARYLS
BISMUTH ALLYLS
BISMUTH ALKYLS
BORON PRECURSORS
AMMONIA BORANE
Borazine B3N3H6
OCTAHYDRIDOTRIBORATE
TETRAHYDRIDOBORATES
BORON HYDRIDES
BORON HALIDES
BORON ALKOXIDES
Calcium precursors
Ca precursors Table
Ca cyclopentadienyls
Ca alkylsilylamides
Ca β-DIKETONATES
Ca β-DIKETIMINATES
Carbon precursors
ALKANES
ALKENES
ALKYNES
HALOSILYLALKANES
KETONES
ALIPHATIC AMINES
POLYCYCLIC ARENES
HETEROCYCLIC COMPOUN
CERIUM PRECURSORS
Ce CYCLOPENTADIENYLS
CERIUM ALKOXIDES
CERIUM β-DIKETONATES
Ce β-KETOIMINATES
Cesium precusors
Cs Lantanide precurs
Cs ALKYLSILYLOXIDES
CESIUM ALKOXIDES
Cs ALKYLSILYLAMIDES
CESIUM AMIDE
CESIUM TELLURIDES
CESIUM OXIDES
CESIUM HALIDES
CESIUM METAL Cs
CESIUM β-DIKETONATES
Chromium precursors
Comparison Cr precur
Cr CARBOXYLATES
Dialkyldithiocarbama
Cr β-DIKETONATES
CHROMIUM ALKOXIDES
CHROMIUM AMIDINATES
CHROMIUM ALKYLAMIDES
CrCycloheptatrienyls
Cr CYCLOPENTADIENYLS
CHROMIUM PENTADIENYL
CHROMIUM ALKYLS
CHROMIUM BIS(ARENES)
CHROMIUM CYCLOHEPTAT
CHROMIUM ARENES-CARB
CHROMIUM TETRAALKYLB
CHROMIUM BORHYDRIDES
CHROMIUM NITRATES
CHROMIUM OXYHALIDES
CHROMIUM OXIDES
CHROMIUM CARBONYLS
Cr (PF3)x carbonyls
Trifluorophosphines
Cr Cp carbonyls
CHROMIUM HALIDES
COBALT PRECURSORS
COBALT CARBOXYLATES
Co(III)β-DIKETONATES
Co(II) β-DIKETONATES
Co ALKYLAMIDINATES
Co CYCLOPENTADIENYLS
Co Cp CARBONYLS
HYDRIDE ALKYLPHOSPHI
Co HYDRIDE-CARBONYLS
Co ALLYLS CARBONYLS
ALKYLS CARBONYLS
CARBINES CARBONYLS
Co ALKYNES CARBONYLS
COBALT CARBONYLS
COBALT NITRATES
COBALT HALIDES
Co NITROSYL CARBONYL
Co-Si SINGLE-SOURCE
Co-Al SINGLE-SOURCE
DYSPROSIUM PRECURSOR
DYSPROSIUM AMIDINATE
DYSPROSIUM β-DIKETON
DYSPROSIUM ALKOXIDES
Dy CYCLOPENTADIENYLS
DYSPROSIUM HALIDES
ERBIUM PRECURSORS
Er ALKYLXANTHATES
Er ALKYLAMIDINATES
ERBIUM NITRATES
ERBIUM PYRAZOLATES
Er ALKYLSILYLAMIDES
CYCLOPENTADIENYLS
ERBIUM β-DIKETONATES
ERBIUM GUANIDINATES
Gadolinium precursor
Gd β-DIKETONATES
Gd ALKYLGUANIDINATES
ALKYLSILYLAMIDES
Oxo alkoxides
GADOLINIUM ALKOXIDES
Cp ALKOXIDES
Gd CYCLOPENTADIENYLS
ALKYLAMINODIBORANATE
GADOLINIUM NITRATE
GADOLINIUM HALIDES
Gallium precursors
ALKYL-THIOCARBOXYLAT
DISELENOCARBAMATES
DIALKYLDITHIOCARBAMA
ALKYL-DITHIOCARBAMAT
DIALKYLTHIOCARBAMATE
Gallium DIESTERATES
Ga β-DIKETONATES
AlkylGa βDIKETONATES
GaTePHOSHORYLAMIDES
GaSePHOSPHORYLAMIDES
ALKYLGA –SULFIDES
ALKYLGa TELLURIDES
ALKYLGa SELENIDES
ALKYLGaALKYLSULFIDES
Ga ALKYLTIOLATES
DIALKYLGa ALKOXIDES
Ga ALKOXIDES HALIDES
GALLIUM HYDRAZIDES
GALLIUM ALKYLAMIDES
Ga ALKYLS HYDRAZIDES
Ga DITHIOCARBAMATES
GALLIUM ALKYLS
Ga ALKYLS-AZIDES
ALKYLGALLIUM HALIDES
Ga HALIDES-AZIDES
HYDRIDE-AZIDE-HALIDE
Ga HYDRIDES-AZIDES
HYDRIDE-ALKYL-AMIDES
Ga HYDRIDES-AMIDES
Ga hydrides/adducts
[NO2][Ga(NO3)4]
GALLIUM HALIDES
METALLIC Ga
ALKYLGALLIUM AMIDES
GALLIUM ALKOXIDES
Hafnium precursors
Hf(IV) AMIDINATES
Comparison Hf precur
Hf β-KETOESTERATES
Hf β-DIKETONATES
ALKOXIDE-DIKETONATES
HAFNIUM OXOALKOXIDES
HAFNIUM ALKOXIDES
Hf HYDROXYLAMIDES
GUANIDINATES-AMIDES
HAFNIUM ALKYLAMIDES
AMIDES CYCLOPENTADIE
ALKYLS Cp ALKOXIDES
ALKYL CYCLOPENTADIEN
Hf TETRAHYDROBORATES
Hafnium NITRATES
Hafnium HALIDES
Indium precursors
ALKYLS-β-DIKETONATES
INDIUM β-DIKETONATES
ALKYLS-ALKOXIDES
CYCLOPENTADIENYLS
AMINOALKYLS-AZIDES
AMINOALKYLS-ALKYLS
INDIUM ALKYLS
INDIUM ALKYLS-AZIDES
SELENIDES ALKYLS
ALKYL-ALKYLSELENIDES
ALKYL-ALKYLTHIOLATES
ALKYLINDIUM HALIDES
INDIUM HALIDES
IRON PRECURSORS
Fe(CO)x CYCLOALKENES
IRON CARBONYLS-DISUL
IRON β-DIKETONATES
IRON β-KETOESTERATES
IRON ALKOXIDES
IRON AMIDINATES
Fe CYCLOPENTADIENYLS
TRIHALOSILYLS (CO)x
IRON CARBONYLS
TRIFLUOROPHOSPHINES
IRON HALIDES
Lithium precursors
Standard page
LI β-DIKETONATES
TRIALKYLSILYLAMIDES
LI DIALKYLAMIDES
LITHIUM ALKOXIDES
Li CYCLOPENTADIENYLS
LITHIUM ARYLS
LITHIUM ALKYLS
LITHIUM NITRIDES
Li-Nb ALKOXIDES
LiNb ALKOXID DIKETON
Li-Ta ALKOXIDES
LEAD PRECURSORS
LEAD CARBOXYLATES
DIALKYLDITHIOCARBAMA
DISULFOIMIDODIPHOSPH
LEAD β-DIKETONATES
LEAD ALKYLS-ALKOXIDE
LEAD ARYLS
LEAD ALKYLS
LEAD CARBONATES
LEAD ALKOXIDES
Magnesium precursors
Mg DIALKYLCARBAMATES
Mg CARBOXYLATES
MgCp β-DIKETIMINATES
Mg β-KETOIMINATES
Mg β-DIKETONATES
Mg ALKYLS-ALKOXIDES
Mg alkylamidinates
Magnesium metal
MAGNESIUM HALIDES
Mg BORHYDRIDES
MAGNESIUM ALKYLS
Mg Cyclopentadienyls
MANGANESE PRECURSORS
Mn CARBOXYLATES
Mn ANTHRANILATES
Mn ALKYLXANTHATES
Mn DITHIOCARBAMATES
Mn β-DIKETONATES
Mn ALKYLMERCURIDES
Mn ALKYLTELLURIDES
Mn ALKYLAMIDINATES
Mn ALKYLSILYLAMIDES
Mn CYCLOPENTADIENYLS
Mn HYDRIDES-Cp
Mn AlkylCp carbonyls
Mn ACYLS-CARBONYLS
Alkyl Mn CARBONYLS
MANGANESE CARBONYLS
MANGANESE HALIDES
MANGANESE NITRATES
Manganese metal
Mn HALIDES-CARBONYLS
NICKEL PRECURSORS
Ni ALKYLXANTHATES
Ni-Sn ALKOXIDES
IMIDOTHIOPHOSPHINATE
Ni DITHIOCARBAMATES
NICKEL OXIMATES
Ni β-KETOIMINATES
Ni AMINOALKOXIDES
NICKEL β-DIKETONATES
Ni CYCLOPENTADIENYLS
Cp ALLYLS
NICKEL CARBONYLS
NICKEL AMIDINATES
NIOBIUM PRECURSORS
ALKYLIMIDE-ALKOXIDES
NIOBIUM CARBOXYLATES
NIOBIUM ALKOXIDES
β-DIKETONATES
ALKOXIDE-β-DIKETONAT
NIOBIUM ALKYLAMIDES
ALKYLIMIDE-ALKYLAMID
AMIDINATE IMID AMIDE
HYDRAZID–IMID-HALIDE
HYDRAZIDE-IMIDE-AMID
Nb CYCLOPENTADIENYLS
NIOBIUM (0) ARYLS
NIOBIUM HALIDES
IMIDES-AMIDES-HALIDE
POTASSIUM PRECURSORS
K-Nb ALKOXIDES
β-DIKETONATES
POTASSIUM ALKOXIDES
STRONTIUM PRECURSORS
Sr-Ti PRECURSORS
Sr β-KETOIMINATES
Sr β-DIKETONATES
Trialkylsilylamides
Sr CYCLOPENTADIENYLS
RUBIDIUM PRECURSORS
Rb β-DIKETONATES
Rb ALKYLSILYLOXIDES
RUBIDIUM ALKOXIDES
SILICON PRECURSORS
TRIHALOSILANES
AMINODISILANES
AMINOSILANES
Cp SILANES
SILACYCLOALKANES
ALKYLARYLSILANES
ALKYLSILANES
HALOALKYLVINYLSILANS
HALODISILANES
TETRAHALOSILANES
Si HYDRIDES (SILANES
Silver precursors
SILVER PYRAZOLATES
PHOSPHORYLTHIOUREATE
Ag OXYCHINOLINATES
SILVER SUCCINIMIDE
SILVER AMIDINATES
Ag(I) CARBOXYLATES
SILVER β-DIKETONATES
SILVER PERFLUORARYLS
Ag PERFLUORVINYLS
Ag PERFLUORALKYLS
SILVER HALIDES
SODIUM PRECURSORS
Na CYCLOPENTADIENYLS
ALKYLSILYLAMIDES
SODIUM ALKOXIDES
SODIUM β-DIKETONATES
NaCuAlkoxidDiketonat
Na-Nb ALKOXIDES
Na-Cu ALKOXIDES
NaYAlkoxideDiketonat
Na-Y ALKOXIDES
RHODIUM PRECURSORS
RHODIUM NITRATE
RHODIUM HALIDES
RHODIUM PYRROLYLS
RHODIUM PYRAZOLATES
ALKYLDITHIOCARBAMATE
RHODIUM CARBONYLS
RHODIUM ALLYLS
DIKETONATE-CARBONYLS
Cp ALKENES
Cp CYCLOOCTADIENES
Cp CARBONYLS
ALLYLS CARBONYLS
HALIDES-PF3
HYDRIDES-PF3
RHODIUM βDIKETONATES
RHODIUM CARBOXYLATES
TELLURIUM PRECURSORS
ALKYLTELLUROLATES
HETEROCYCLIC COMP.
Te (IV) AMIDINATES
Te(IV) DIALKYLSILYLS
DIALKYLDITELLURIDES
TELLURIUM AMIDES
ALKYLGERMYLS
Te(II)TRIALKYLSILYLS
TELLURIUM ALKYLS
Tin MOCVD precursors
Sn-Co precursors
CARBOXYLATES ALKYLS
TIN β-DIKETONATES
β-DIKETONATE-HALIDES
TIN ALKYLDITHIOLATES
TIN ALKOXIDES
TIN ALKYLAMIDES
TIN(III) TRIALKYLS
TIN TETRAALKYLS
TRIALKYLSTANNANES
DIALKYLSTANNANES
MONOALKYLSTANNANES
TIN ALKYLS-HALIDES
TIN TETRAHALIDES
TIN NITRATES
TIN HYDRIDES
TITANIUM PRECURSORS
TITANIUM AMIDINATES
AMIDINATES ALKOXIDES
ALKOXYKETOIMINATES
Ti(III)β-DIKETONATES
AMIDES β-DIKETONATES
ALKOXIDE βDIKETONATE
TITANYL β-DIKETONATE
TITANYL βKETOESTERAT
ALKOXIDE KETOESTERAT
DIOLATE KETOESTERATE
DIOLAT AMINOALKOXIDE
TITANIUM ALKOXIDES
Ti AMINOALKOXIDES
ALKOXID-STANNYLAMIDE
ALKOXIDE-ALKYLAMIDES
PYRROLYLS-ALKOXIDES
PYRROLYL-ALKYLAMIDES
Ti(IV) ALKYLAMIDES
IMIDES-AMIDES
ALKYLS- ALKYLAMIDES
Cp ALKYLAMIDES
Cp ALKOXIDES
Ti Cp HALIDES
Cp - CARBONYLS
Ti CYCLOPENTADIENYLS
Ti (II) PENTADIENYLS
TITANIUM ALKYLS
ALKYLS-ALKYLAMIDES
Ti HALIDES-AMIDES
HALIDES-HYDRAZIDES
HALIDES-ALKYLS
Ti HALIDES ADDUCTS
TITANIUM HALIDES
TITANIUM (0) ARENES
Ti(0) HETEROADDUCTS
TITANIUM METAL
Ti nitrate Ti(NO3)4
TETRAHYDRIDOBORATES
Vanadium precursors
Cp-CARBONYLS
HALIDES-SELENOETHERS
HALIDE-DISELENOETHER
Cp ALKYLSELENOLATES
VANADYL βDIKETONATES
VANADYL ALKOXIDES
VANADIUM ALKOXIDES
VANADIUM ALKYLAMIDES
VANADIUM ARENES
V CYCLOPENTADIENYLS
V CYCLOPENTADIENYLS
VANADIUM OXYHALIDES
VANADIUM HALIDES
YTTRIUM PRECURSORS
Y β-DIKETONATES
ALKYLAMIDINATES
YTTRIUM GUANIDINATES
Y CYCLOPENTADIENYLS
ALKYLAMINODIBORANATE
Zinc precursors
ZINC ALKYLXANTHATES
DIALKYLDITHIOCARBAMA
ALKYL DISELENOCARBAM
ALKYLS-DITHIOCARBAMA
Zn DIALKYLCARBAMATES
ZINC OXOCARBOXYLATES
ZINC CARBOXYLATES
ZINC β-KETOESTERATES
ZINC β-DIKETONATES
ALKOXIDE DIKETONATES
ALKYLZINC ALKOXIDES
ZnAlkylSilylTellurid
Zn ALKYLSILYLAMIDES
ZINC DIALKYLAMIDES
AlkylZnDIALKYLAMIDES
AlkylZn EtherAdducts
AlkylZn AmineADDUCTS
ZINC ALKYLS
ZINC ALKYLS-HALIDES
ZINC METAL
ZINC HALIDES
ZINC NITRATES
Zirconium precusors
GUANIDINATES AMIDES
DIKETIMINATES AMIDES
Zr(IV) diketiminates
Zr (IV) ketominates
Zr β-DIKETONATES
DIKETONATE ALKOXIDES
ZIRCONIUM ALKOXIDES
Zr DIALKYLAMIDES
Zr Cp ALKYLAMIDES
Zr CYCLOPENTADIENYLS
Zr Cp ACETYLIDES
ZrCp ALKYL ALKOXIDES
Zr Cp ALKYLS
Zr Cp HYDRIDE ALKYLS
Zr Cp carbonyls
Zr Cpx (BH4)1-x
Zr AlkylCp HALIDES
ZIRCONIUM ALKYLS
Zr ALKYLS- HALIDES
Zr TETRAHYDROBORATES
Zirconium HALIDES
TUNGSTEN PRECURSORS
GUANIDIN-IMID-HYDRID
AMIDINATE-IMID-AMIDE
TUNGSTEN (VI) ALKYLS
KETOMINATE OXOALKOXY
HYDRAZIDES - HALIDES
IMIDES AMIDINATES
IMIDES-AMIDES
KETOESTERAT OXOALKOX
DIKETONATE OXOALKOXY
W (VI) OXOALKOXIDES
W (V) ALKOXIDES
W (VI) ALKOXIDES
TUNGSTEN ARYLOXIDES
IMIDES-HALIDES
ALKYLS Cp CARBONYLS
CYCLODIENE-CARBONYLS
CYCLOTRIENE CARBONYL
HYDRIDE Cp CARBONYLS
ARENES-CARBONYLS
W(IV) Cp HYDRIDES
TUNGSTEN ALLYLS
TUNGSTEN BIS(ARENES)
CARBONYL-ISONITRILES
TUNGSTEN CARBONYLS
GUANIDINAT-IMID-AMID
Tellurium MOCVD/ALD precursors
Tellurium is often used as dopant in the III-V layers grown by MOCVD
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