Encyclopedia of (MO)CVD and ALD precursors ~ Cerium MOCVD and ALD precursors

Various classes of MOCVD precursors (cyclopentadienyls, alkoxides, β-diketonates) have been used for the MOCVD and ALD of cerium-containing layers.

Table 1-1. Cerium MOCVD and ALD precursors and their properties

Table 1-2. Cerium MOCVD and ALD precursors and their properties