Strontium MOCVD precursors

    Strontium-containing materials such as SrTiO3,  BaxSr1–xTiO3,  SrBi2Ta2O9, are the materials of increasing interest in the nicroelectronic industry; the layers of these materials have been reported to be prepared by ALD and CVD.

    However, there is a lack of strontium metal-organic compound having both high volatility and sufficiently low melting point for proper utilization as reagent source for deposition of thin films containing strontium; alklycyclopentadienyls (substituted metallocenes) and β-diketonates are the most promising in this respect.