Strontium MOCVD precursors
Strontium-containing materials such as SrTiO3, BaxSr1–xTiO3, SrBi2Ta2O9, are the materials of increasing interest in the nicroelectronic industry; the layers of these materials have been reported to be prepared by ALD and CVD.
However, there is a lack of strontium metal-organic compound having both high volatility and sufficiently low melting point for proper utilization as reagent source for deposition of thin films containing strontium; alklycyclopentadienyls (substituted metallocenes) and β-diketonates are the most promising in this respect.