Encyclopedia of (MO)CVD and ALD precursors
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  • Aluminum precursors
    • ALKYLS-β-DIKETONATES
    • ALKYLS β-DIKETONATES
    • Al HYDRIDES (ALANES)
    • Al ALKYLS-HYDRIDES
    • Al Hydrid-Borhydrid
    • ALUMINUM BORHYDRIDES
    • ALUMINUM HALIDES
    • ALKYLALUMINUM HALIDE
    • ALUMINUM ALKYLS
    • Al ALKYLS-ALKOXIDES
    • ALUMINUM ALKOXIDES
    • Al AMINOALKOXIDES
    • ALUMINUM ALKYLAMIDES
    • ALUMINUM HYDRAZIDES
    • AL β-DIKETONATES
  • ANTIMONY PRECURSORS
    • ANTIMONY THIOLATES
    • ANTIMONY CARBAMATES
    • ANTIMONY ALKOXIDES
    • Cp-ANTIMONY HALIDES
    • TETRAALKYLDISTIBINES
    • HYDRIDES-DIALKYLS
    • Sb AZIRIDINIDES
    • Sb GUANIDINATES
    • DIALKYLSILYLAMIDES
    • Sb DIALKYLAMIDES
    • ALKYLS(ALKYLSTIBINES
    • DIHYDRIDES-ALKYLS
    • Sb HYDRIDE (STIBINE)
    • ANTIMONY HALIDES
    • Sb-Te PRECURSORS
  • Arsenic precursors
    • ELEMENTAL ARSENIC
    • ARSENIC HALIDES
    • ARSINE
    • ALKYLARSINES
    • ARSENIC ALKYLAMIDES
  • Barium precursors
    • BARIUM HALIDES
    • Ba cyclopentadienyls
    • BARIUM β-DIKETONATES
    • Ba β-KETOIMINATES
    • Ba β-DIKETIMINATES
    • Ba pyrazolylborates
  • Beryllium precursors
    • Beryllium metal
    • Beryllium halides
    • Beryllium alkyls
    • Be cyclopentadienyls
    • Be β-diketonates
    • Be oxo–carboxylates
  • BISMUTH PRECURSORS
    • BISMUTH AMIDINATES
    • ALKYLSILYLAMIDES
    • IMINO-P-CHALCOGENIDE
    • Bi β-DIKETONATES
    • BISMUTH ALKOXIDES
    • BISMUTH ARYLS
    • BISMUTH ALKYLS-ARYLS
    • BISMUTH ALLYLS
    • BISMUTH ALKYLS
  • BORON PRECURSORS
    • AMMONIA BORANE
    • Borazine B3N3H6
    • OCTAHYDRIDOTRIBORATE
    • TETRAHYDRIDOBORATES
    • BORON HYDRIDES
    • BORON HALIDES
    • BORON ALKOXIDES
  • Calcium precursors
    • Ca precursors Table
    • Ca cyclopentadienyls
    • Ca alkylsilylamides
    • Ca β-DIKETONATES
    • Ca β-DIKETIMINATES
  • Carbon precursors
    • ALKANES
    • ALKENES
    • ALKYNES
    • HALOSILYLALKANES
    • KETONES
    • ALIPHATIC AMINES
    • POLYCYCLIC ARENES
    • HETEROCYCLIC COMPOUN
  • CERIUM PRECURSORS
    • Ce CYCLOPENTADIENYLS
    • CERIUM ALKOXIDES
    • CERIUM β-DIKETONATES
    • Ce β-KETOIMINATES
  • Cesium precusors
    • Cs Lantanide precurs
    • Cs ALKYLSILYLOXIDES
    • CESIUM ALKOXIDES
    • Cs ALKYLSILYLAMIDES
    • CESIUM AMIDE
    • CESIUM TELLURIDES
    • CESIUM OXIDES
    • CESIUM HALIDES
    • CESIUM METAL Cs
    • CESIUM β-DIKETONATES
  • Chromium precursors
    • Comparison Cr precur
    • Cr CARBOXYLATES
    • Dialkyldithiocarbama
    • Cr β-DIKETONATES
    • CHROMIUM ALKOXIDES
    • CHROMIUM AMIDINATES
    • CHROMIUM ALKYLAMIDES
    • CrCycloheptatrienyls
    • Cr CYCLOPENTADIENYLS
    • CHROMIUM PENTADIENYL
    • CHROMIUM ALKYLS
    • CHROMIUM BIS(ARENES)
    • CHROMIUM CYCLOHEPTAT
    • CHROMIUM ARENES-CARB
    • CHROMIUM TETRAALKYLB
    • CHROMIUM BORHYDRIDES
    • CHROMIUM NITRATES
    • CHROMIUM OXYHALIDES
    • CHROMIUM OXIDES
    • CHROMIUM CARBONYLS
    • Cr (PF3)x carbonyls
    • Trifluorophosphines
    • Cr Cp carbonyls
    • CHROMIUM HALIDES
  • COBALT PRECURSORS
    • COBALT CARBOXYLATES
    • Co(III)β-DIKETONATES
    • Co(II) β-DIKETONATES
    • Co ALKYLAMIDINATES
    • Co CYCLOPENTADIENYLS
    • Co Cp CARBONYLS
    • HYDRIDE ALKYLPHOSPHI
    • Co HYDRIDE-CARBONYLS
    • Co ALLYLS CARBONYLS
    • ALKYLS CARBONYLS
    • CARBINES CARBONYLS
    • Co ALKYNES CARBONYLS
    • COBALT CARBONYLS
    • COBALT NITRATES
    • COBALT HALIDES
    • Co NITROSYL CARBONYL
    • Co-Si SINGLE-SOURCE
    • Co-Al SINGLE-SOURCE
  • DYSPROSIUM PRECURSOR
    • DYSPROSIUM AMIDINATE
    • DYSPROSIUM β-DIKETON
    • DYSPROSIUM ALKOXIDES
    • Dy CYCLOPENTADIENYLS
    • DYSPROSIUM HALIDES
  • ERBIUM PRECURSORS
    • Er ALKYLXANTHATES
    • Er ALKYLAMIDINATES
    • ERBIUM NITRATES
    • ERBIUM PYRAZOLATES
    • Er ALKYLSILYLAMIDES
    • CYCLOPENTADIENYLS
    • ERBIUM β-DIKETONATES
    • ERBIUM GUANIDINATES
  • Gadolinium precursor
    • Gd β-DIKETONATES
    • Gd ALKYLGUANIDINATES
    • ALKYLSILYLAMIDES
    • Oxo alkoxides
    • GADOLINIUM ALKOXIDES
    • Cp ALKOXIDES
    • Gd CYCLOPENTADIENYLS
    • ALKYLAMINODIBORANATE
    • GADOLINIUM NITRATE
    • GADOLINIUM HALIDES
  • Gallium precursors
    • ALKYL-THIOCARBOXYLAT
    • DISELENOCARBAMATES
    • DIALKYLDITHIOCARBAMA
    • ALKYL-DITHIOCARBAMAT
    • DIALKYLTHIOCARBAMATE
    • Gallium DIESTERATES
    • Ga β-DIKETONATES
    • AlkylGa βDIKETONATES
    • GaTePHOSHORYLAMIDES
    • GaSePHOSPHORYLAMIDES
    • ALKYLGA –SULFIDES
    • ALKYLGa TELLURIDES
    • ALKYLGa SELENIDES
    • ALKYLGaALKYLSULFIDES
    • Ga ALKYLTIOLATES
    • DIALKYLGa ALKOXIDES
    • Ga ALKOXIDES HALIDES
    • GALLIUM HYDRAZIDES
    • GALLIUM ALKYLAMIDES
    • Ga ALKYLS HYDRAZIDES
    • Ga DITHIOCARBAMATES
    • GALLIUM ALKYLS
    • Ga ALKYLS-AZIDES
    • ALKYLGALLIUM HALIDES
    • Ga HALIDES-AZIDES
    • HYDRIDE-AZIDE-HALIDE
    • Ga HYDRIDES-AZIDES
    • HYDRIDE-ALKYL-AMIDES
    • Ga HYDRIDES-AMIDES
    • Ga hydrides/adducts
    • [NO2][Ga(NO3)4]
    • GALLIUM HALIDES
    • METALLIC Ga
    • ALKYLGALLIUM AMIDES
    • GALLIUM ALKOXIDES
  • Hafnium precursors
    • Hf(IV) AMIDINATES
    • Comparison Hf precur
    • Hf β-KETOESTERATES
    • Hf β-DIKETONATES
    • ALKOXIDE-DIKETONATES
    • HAFNIUM OXOALKOXIDES
    • HAFNIUM ALKOXIDES
    • Hf HYDROXYLAMIDES
    • GUANIDINATES-AMIDES
    • HAFNIUM ALKYLAMIDES
    • AMIDES CYCLOPENTADIE
    • ALKYLS Cp ALKOXIDES
    • ALKYL CYCLOPENTADIEN
    • Hf TETRAHYDROBORATES
    • Hafnium NITRATES
    • Hafnium HALIDES
  • Indium precursors
    • ALKYLS-β-DIKETONATES
    • INDIUM β-DIKETONATES
    • ALKYLS-ALKOXIDES
    • CYCLOPENTADIENYLS
    • AMINOALKYLS-AZIDES
    • AMINOALKYLS-ALKYLS
    • INDIUM ALKYLS
    • INDIUM ALKYLS-AZIDES
    • SELENIDES ALKYLS
    • ALKYL-ALKYLSELENIDES
    • ALKYL-ALKYLTHIOLATES
    • ALKYLINDIUM HALIDES
    • INDIUM HALIDES
  • IRON PRECURSORS
    • Fe(CO)x CYCLOALKENES
    • IRON CARBONYLS-DISUL
    • IRON β-DIKETONATES
    • IRON β-KETOESTERATES
    • IRON ALKOXIDES
    • IRON AMIDINATES
    • Fe CYCLOPENTADIENYLS
    • TRIHALOSILYLS (CO)x
    • IRON CARBONYLS
    • TRIFLUOROPHOSPHINES
    • IRON HALIDES
  • Lithium precursors
    • Standard page
    • LI β-DIKETONATES
    • TRIALKYLSILYLAMIDES
    • LI DIALKYLAMIDES
    • LITHIUM ALKOXIDES
    • Li CYCLOPENTADIENYLS
    • LITHIUM ARYLS
    • LITHIUM ALKYLS
    • LITHIUM NITRIDES
    • Li-Nb ALKOXIDES
    • LiNb ALKOXID DIKETON
    • Li-Ta ALKOXIDES
  • LEAD PRECURSORS
    • LEAD CARBOXYLATES
    • DIALKYLDITHIOCARBAMA
    • DISULFOIMIDODIPHOSPH
    • LEAD β-DIKETONATES
    • LEAD ALKYLS-ALKOXIDE
    • LEAD ARYLS
    • LEAD ALKYLS
    • LEAD CARBONATES
    • LEAD ALKOXIDES
  • Magnesium precursors
    • Mg DIALKYLCARBAMATES
    • Mg CARBOXYLATES
    • MgCp β-DIKETIMINATES
    • Mg β-KETOIMINATES
    • Mg β-DIKETONATES
    • Mg ALKYLS-ALKOXIDES
    • Mg alkylamidinates
    • Magnesium metal
    • MAGNESIUM HALIDES
    • Mg BORHYDRIDES
    • MAGNESIUM ALKYLS
    • Mg Cyclopentadienyls
  • MANGANESE PRECURSORS
    • Mn CARBOXYLATES
    • Mn ANTHRANILATES
    • Mn ALKYLXANTHATES
    • Mn DITHIOCARBAMATES
    • Mn β-DIKETONATES
    • Mn ALKYLMERCURIDES
    • Mn ALKYLTELLURIDES
    • Mn ALKYLAMIDINATES
    • Mn ALKYLSILYLAMIDES
    • Mn CYCLOPENTADIENYLS
    • Mn HYDRIDES-Cp
    • Mn AlkylCp carbonyls
    • Mn ACYLS-CARBONYLS
    • Alkyl Mn CARBONYLS
    • MANGANESE CARBONYLS
    • MANGANESE HALIDES
    • MANGANESE NITRATES
    • Manganese metal
    • Mn HALIDES-CARBONYLS
  • NICKEL PRECURSORS
    • Ni ALKYLXANTHATES
    • Ni-Sn ALKOXIDES
    • IMIDOTHIOPHOSPHINATE
    • Ni DITHIOCARBAMATES
    • NICKEL OXIMATES
    • Ni β-KETOIMINATES
    • Ni AMINOALKOXIDES
    • NICKEL β-DIKETONATES
    • Ni CYCLOPENTADIENYLS
    • Cp ALLYLS
    • NICKEL CARBONYLS
    • NICKEL AMIDINATES
  • NIOBIUM PRECURSORS
    • ALKYLIMIDE-ALKOXIDES
    • NIOBIUM CARBOXYLATES
    • NIOBIUM ALKOXIDES
    • β-DIKETONATES
    • ALKOXIDE-β-DIKETONAT
    • NIOBIUM ALKYLAMIDES
    • ALKYLIMIDE-ALKYLAMID
    • AMIDINATE IMID AMIDE
    • HYDRAZID–IMID-HALIDE
    • HYDRAZIDE-IMIDE-AMID
    • Nb CYCLOPENTADIENYLS
    • NIOBIUM (0) ARYLS
    • NIOBIUM HALIDES
    • IMIDES-AMIDES-HALIDE
  • POTASSIUM PRECURSORS
    • K-Nb ALKOXIDES
    • β-DIKETONATES
    • POTASSIUM ALKOXIDES
  • STRONTIUM PRECURSORS
    • Sr-Ti PRECURSORS
    • Sr β-KETOIMINATES
    • Sr β-DIKETONATES
    • Trialkylsilylamides
    • Sr CYCLOPENTADIENYLS
  • RUBIDIUM PRECURSORS
    • Rb β-DIKETONATES
    • Rb ALKYLSILYLOXIDES
    • RUBIDIUM ALKOXIDES
  • SILICON PRECURSORS
    • TRIHALOSILANES
    • AMINODISILANES
    • AMINOSILANES
    • Cp SILANES
    • SILACYCLOALKANES
    • ALKYLARYLSILANES
    • ALKYLSILANES
    • HALOALKYLVINYLSILANS
    • HALODISILANES
    • TETRAHALOSILANES
    • Si HYDRIDES (SILANES
  • Silver precursors
    • SILVER PYRAZOLATES
    • PHOSPHORYLTHIOUREATE
    • Ag OXYCHINOLINATES
    • SILVER SUCCINIMIDE
    • SILVER AMIDINATES
    • Ag(I) CARBOXYLATES
    • SILVER β-DIKETONATES
    • SILVER PERFLUORARYLS
    • Ag PERFLUORVINYLS
    • Ag PERFLUORALKYLS
    • SILVER HALIDES
  • SODIUM PRECURSORS
    • Na CYCLOPENTADIENYLS
    • ALKYLSILYLAMIDES
    • SODIUM ALKOXIDES
    • SODIUM β-DIKETONATES
    • NaCuAlkoxidDiketonat
    • Na-Nb ALKOXIDES
    • Na-Cu ALKOXIDES
    • NaYAlkoxideDiketonat
    • Na-Y ALKOXIDES
  • RHODIUM PRECURSORS
    • RHODIUM NITRATE
    • RHODIUM HALIDES
    • RHODIUM PYRROLYLS
    • RHODIUM PYRAZOLATES
    • ALKYLDITHIOCARBAMATE
    • RHODIUM CARBONYLS
    • RHODIUM ALLYLS
    • DIKETONATE-CARBONYLS
    • Cp ALKENES
    • Cp CYCLOOCTADIENES
    • Cp CARBONYLS
    • ALLYLS CARBONYLS
    • HALIDES-PF3
    • HYDRIDES-PF3
    • RHODIUM βDIKETONATES
    • RHODIUM CARBOXYLATES
  • TELLURIUM PRECURSORS
    • ALKYLTELLUROLATES
    • HETEROCYCLIC COMP.
    • Te (IV) AMIDINATES
    • Te(IV) DIALKYLSILYLS
    • DIALKYLDITELLURIDES
    • TELLURIUM AMIDES
    • ALKYLGERMYLS
    • Te(II)TRIALKYLSILYLS
    • TELLURIUM ALKYLS
  • Tin MOCVD precursors
    • Sn-Co precursors
    • CARBOXYLATES ALKYLS
    • TIN β-DIKETONATES
    • β-DIKETONATE-HALIDES
    • TIN ALKYLDITHIOLATES
    • TIN ALKOXIDES
    • TIN ALKYLAMIDES
    • TIN(III) TRIALKYLS
    • TIN TETRAALKYLS
    • TRIALKYLSTANNANES
    • DIALKYLSTANNANES
    • MONOALKYLSTANNANES
    • TIN ALKYLS-HALIDES
    • TIN TETRAHALIDES
    • TIN NITRATES
    • TIN HYDRIDES
  • TITANIUM PRECURSORS
    • TITANIUM AMIDINATES
    • AMIDINATES ALKOXIDES
    • ALKOXYKETOIMINATES
    • Ti(III)β-DIKETONATES
    • AMIDES β-DIKETONATES
    • ALKOXIDE βDIKETONATE
    • TITANYL β-DIKETONATE
    • TITANYL βKETOESTERAT
    • ALKOXIDE KETOESTERAT
    • DIOLATE KETOESTERATE
    • DIOLAT AMINOALKOXIDE
    • TITANIUM ALKOXIDES
    • Ti AMINOALKOXIDES
    • ALKOXID-STANNYLAMIDE
    • ALKOXIDE-ALKYLAMIDES
    • PYRROLYLS-ALKOXIDES
    • PYRROLYL-ALKYLAMIDES
    • Ti(IV) ALKYLAMIDES
    • IMIDES-AMIDES
    • ALKYLS- ALKYLAMIDES
    • Cp ALKYLAMIDES
    • Cp ALKOXIDES
    • Ti Cp HALIDES
    • Cp - CARBONYLS
    • Ti CYCLOPENTADIENYLS
    • Ti (II) PENTADIENYLS
    • TITANIUM ALKYLS
    • ALKYLS-ALKYLAMIDES
    • Ti HALIDES-AMIDES
    • HALIDES-HYDRAZIDES
    • HALIDES-ALKYLS
    • Ti HALIDES ADDUCTS
    • TITANIUM HALIDES
    • TITANIUM (0) ARENES
    • Ti(0) HETEROADDUCTS
    • TITANIUM METAL
    • Ti nitrate Ti(NO3)4
    • TETRAHYDRIDOBORATES
  • Vanadium precursors
    • Cp-CARBONYLS
    • HALIDES-SELENOETHERS
    • HALIDE-DISELENOETHER
    • Cp ALKYLSELENOLATES
    • VANADYL βDIKETONATES
    • VANADYL ALKOXIDES
    • VANADIUM ALKOXIDES
    • VANADIUM ALKYLAMIDES
    • VANADIUM ARENES
    • V CYCLOPENTADIENYLS
    • V CYCLOPENTADIENYLS
    • VANADIUM OXYHALIDES
    • VANADIUM HALIDES
  • YTTRIUM PRECURSORS
    • Y β-DIKETONATES
    • ALKYLAMIDINATES
    • YTTRIUM GUANIDINATES
    • Y CYCLOPENTADIENYLS
    • ALKYLAMINODIBORANATE
  • Zinc precursors
    • ZINC ALKYLXANTHATES
    • DIALKYLDITHIOCARBAMA
    • ALKYL DISELENOCARBAM
    • ALKYLS-DITHIOCARBAMA
    • Zn DIALKYLCARBAMATES
    • ZINC OXOCARBOXYLATES
    • ZINC CARBOXYLATES
    • ZINC β-KETOESTERATES
    • ZINC β-DIKETONATES
    • ALKOXIDE DIKETONATES
    • ALKYLZINC ALKOXIDES
    • ZnAlkylSilylTellurid
    • Zn ALKYLSILYLAMIDES
    • ZINC DIALKYLAMIDES
    • AlkylZnDIALKYLAMIDES
    • AlkylZn EtherAdducts
    • AlkylZn AmineADDUCTS
    • ZINC ALKYLS
    • ZINC ALKYLS-HALIDES
    • ZINC METAL
    • ZINC HALIDES
    • ZINC NITRATES
  • Zirconium precusors
    • GUANIDINATES AMIDES
    • DIKETIMINATES AMIDES
    • Zr(IV) diketiminates
    • Zr (IV) ketominates
    • Zr β-DIKETONATES
    • DIKETONATE ALKOXIDES
    • ZIRCONIUM ALKOXIDES
    • Zr DIALKYLAMIDES
    • Zr Cp ALKYLAMIDES
    • Zr CYCLOPENTADIENYLS
    • Zr Cp ACETYLIDES
    • ZrCp ALKYL ALKOXIDES
    • Zr Cp ALKYLS
    • Zr Cp HYDRIDE ALKYLS
    • Zr Cp carbonyls
    • Zr Cpx (BH4)1-x
    • Zr AlkylCp HALIDES
    • ZIRCONIUM ALKYLS
    • Zr ALKYLS- HALIDES
    • Zr TETRAHYDROBORATES
    • Zirconium HALIDES
  • TUNGSTEN PRECURSORS
    • GUANIDIN-IMID-HYDRID
    • AMIDINATE-IMID-AMIDE
    • TUNGSTEN (VI) ALKYLS
    • KETOMINATE OXOALKOXY
    • HYDRAZIDES - HALIDES
    • IMIDES AMIDINATES
    • IMIDES-AMIDES
    • KETOESTERAT OXOALKOX
    • DIKETONATE OXOALKOXY
    • W (VI) OXOALKOXIDES
    • W (V) ALKOXIDES
    • W (VI) ALKOXIDES
    • TUNGSTEN ARYLOXIDES
    • IMIDES-HALIDES
    • ALKYLS Cp CARBONYLS
    • CYCLODIENE-CARBONYLS
    • CYCLOTRIENE CARBONYL
    • HYDRIDE Cp CARBONYLS
    • ARENES-CARBONYLS
    • W(IV) Cp HYDRIDES
    • TUNGSTEN ALLYLS
    • TUNGSTEN BIS(ARENES)
    • CARBONYL-ISONITRILES
    • TUNGSTEN CARBONYLS
    • GUANIDINAT-IMID-AMID

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