Zinc MOCVD-ALD precursors

Zinc-containing films deposited using MOCVD/MOVPE methods are widely applied in semiconductor industry.

Thin films of zinc-containing binary semiconductors such as ZnO, [5,6] ZnS, [7] , ZnSe [8], and ZnTe[9] and ternary semiconductors [9,10] such as ZnS1-xSex, and Zn1-xCdxS are of high industrial interest and importance. Zinc is used as p-dopant in GaAs and other III-V materials.