Calcium MOCVD precursors

 

Calcium β-diketonates are one of the most popular precursors for MOCVD of calcium-contaning thin films, because of their volatility, suitable thermal stability and non-sensitivity to air.

 

The coordination behavior in the organic solutions of several metal β -diketonates (including calcium β –diketonates) has been studied by 1H-NMR. It was determined that in the solution calcium acetylacetonate {Ca(acac)2}x is polymeric, while calcium benzoylacetonate Ca(bzac)2 is monomeric. Pseudo-tetrahedral D2d idealized structure has been favored based on chemical shift values and other arguments. [[i]]

 



[i] A.Recca†, F. Bottino† and P. Finnocchiaro , Harry G. Brittain, Journal of Inorganic and Nuclear Chemistry, Vol. 40, Issue 12, 1978, Pages 1997-1999 Static stereochemistry of the β-diketonate complexes of group II metals