Barium is an element which is one of the most difficult to vaporise it terms of volatility of its compounds. Barium alkoxides are polymeric and non-volatile.[Bradley; Turevskaya] Barium alkylamides also do not display significant volatility. Only branched alkyl radical-substituted cyclopentadienyls and β-diketonates, as well as some β-ketoiminates can be vaporised at  low pressure and elevated tempertures without significant premature decomposition.

In general, thermal decomposition and carbon incorporation are issues observed when using barium metallocene precursors in MOCVD applications

  Barium bis(cyclopentadienyl) (barocene) BaCp2

            Barium bis(cyclopentadienyl) (barocene) BaCp2 is polymeric, non-volatile and therefore not suitable for CVD applications.[[i]]

 Barium isopropylcyclopentadienyl Ba(ⁱPrCp)₂

Barium isopropylcyclopentadienyl Ba(ⁱPrCp)₂ has been used together with Y(ⁱPrCp)₃ and Cu(EtCp)(Et₃P) for the deposition of high-temperature superconducting YBaCuO films by CVD at °C. []

Barium pentamethylcyclopentadienyl Ba(Me₅Cp)₂

Barium pentamethylcyclopentadienyl Ba(C₅Me₅)₂ has been applied as a precursor growth of BaTiO3 films by ALD at temperatures ≤ 275°C, in combination with Ti(OiPr)4 and H₂O as Ti and O sources, respectively. Significant decomposition of Ba(C5(CH3)5)2 was observed at higher growth temperatures, issues with reproducibility of composition and properties were found even at a depositions temperature of 275°C. [4]